Scanning mu-RBS characterisation of local loading effects of non-selectively epitaxially grown SiGe thin films

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Scanning mu-RBS characterisation of local loading effects of non-selectively epitaxially grown SiGe thin films

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Publication Article, peer reviewed scientific
Title Scanning mu-RBS characterisation of local loading effects of non-selectively epitaxially grown SiGe thin films
Author Winzell, T ; Whitlow, Harry J ; Östling, M ; Elfman, M ; Pejnefors, J
Date 2001
DOI http://dx.doi.org/10.1016/S0168-583X(01)00312-3 (link to publisher's fulltext)
Host/Issue Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms;1
Volume 179
ISSN 0168-583X
Pages 121–125
Language eng (iso)
Handle http://hdl.handle.net/2043/548 Permalink to this page
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